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Hy Tran (2541), Meghan Shilling (2541), Andrew Oliver (former Sandian), and Andre Claudet (2614) won a 2008 R&D 100 award for developing a Silicon Micromachined Dimensional Calibration Artifact. The artifact has an innovative three-dimensional structure suitable for calibration of mesoscale measurement machines that use optical, tactile, or a combination of optical and tactile measurement methods. It is made from a single-crystal silicon wafer, patterned and then anisotropically etched to form dimensional features. The same artifact and geometrical features can be used to calibrate vision-based dimensional metrology systems, touch-probe based systems, and hybrid metrology systems. (2500, 2400, 1700) NW